On Wafer Calibration Techniques Enabling Accurate Characterization of High Performance Silicon Devices at the mm Wave Range and Beyond
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On Wafer Calibration Techniques Enabling Accurate Characterization of High Performance Silicon Devices at the mm Wave Range and Beyond

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This book presents solutions for accurate mm-wave characterization of advanced semiconductor devices. It guides through the process of development, implementation and verification of the in-situ calibration methods optimized for high-performance silicon technologies.

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